Institute of Multidisciplinary Research for Advanced Materials, Tohoku University


LAST UPDATE 2021/05/05

  • 研究者氏名
    Researcher Name

    小川修一 Shuichi OGAWA
    助教 Assistant Professor
  • 所属
    Professional Affiliation

    Institute of Multidisciplinary Research for Advanced Materials, Tohoku University

    計測研究部門 固体表面物性研究分野
    Division of Measurements, Solid Surface Physics
  • 研究キーワード
    Research Keywords

    “In-situ” electron spectroscopy
    nano-carbon materials
    CVD processes
    Spectroscopic study using synchrotron radiation
Research Subject
ナノ炭素材料の CVD 成長法と電子状態評価法の開発
Development of CVD process and evaluation methods for nano-carbon materials

研究の背景 Background


Nano-carbon materials such as graphene, nano-graphite, and nano-diamond have superior mechanical and electrical properties, so that synthesis methods of these nano materials are required . Especially, developments of “low temperature synthesis” and “low damage synthesis” are necessary to combine between nano-carbon materials and silicon which is used the substrate in existing electric devices.

研究の目標 Outcome


The elementary steps of CVD growth of nano-carbon materials are clarified through the spectroscopic evaluation of the synthesized materials. Using these knowledge, “low temperature” and “low damage” synthesis will be achieved. In addition, new evaluation procedure of photoelectron and absorption spectra will also developed to investigate the CVD processes of nano-carbon materials.

研究図Research Figure

Fig.1. Graphene formation process on diamond C(111) surfaces studied by photoelectron spectroscopy. Fig.3. Peak decomvolution analysis of Si 2p photoelectron spectra taken using synchrotron radiation for an interface strain analysis Fig.2. (a) Schematic illustration and (b) SEM image of graphene FET with gate dielectric layer made by diamond-like carbon.

文献 / Publications

e-Journal of Surface Science and Nanotechnology 7 (2009) 882., Diamond and Related Materials 22 (2012) 118, Japanese Journal of Applied Physics 51 (2012) 04DB01., Japanese Journal of Applied Physics 52 (2013) 110128.