IMRAM
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
東北大学
多元物質科学研究所
LAST UPDATE 2021/05/08
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研究者氏名
Researcher Name中川勝 Masaru NAKAGAWA
教授 Professor -
所属
Professional Affiliation東北大学多元物質科学研究所
マテリアル・計測ハイブリッド研究センター 光機能材料化学分野
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
Materials-Measurement Hybrid Research Center, Photo-Functional Material Chemistry -
研究キーワード
Research Keywords材料化学・界面科学
光機能高分子レジスト材料
人工反応場
Material chemistry・Interface science
Photo-functional polymer resist materials
Meta-site
- 研究テーマ
Research Subject -
人工反応場の構築を目指した極限ナノ造形と物質科学の探究
Ultimate nano-scale figuration and material science for creation of meta-sites
研究の背景 Background
半導体は産業のコメと呼ばれ、近未来社会の情報通信・データ利用を担います。半導体の進化には更なる小型・積層・高性能を目指した究極のものづくり技術の極限ナノ造形と物質科学の探究が不可欠であり、化学・物理学・機械工学・応用光学の学際領域の共創が必要です。究極のものづくり技術を基盤技術としたエネルギー問題の解決策の提案も重要となっています。我々は、電子線やナノインプリントの先進リソグラフィのナノ加工法での革新を通じた化学エネルギー創出デバイスの創製を目指しています。
Semiconductor technology has been called the rice of industry and will be responsible for information communication and data usage in the near future society. For the evolution of semiconductors, it is essential to explore extreme nanofabrication and material science which support the ultimate manufacturing technology for further miniaturization, multilayering, and high performance based on co-creation in the interdisciplinary fields of chemistry, physics, mechanical engineering, and applied optics. It is also important to propose solutions to energy problems based on ultimate manufacturing technology. Our goal is to create chemical energy-generating devices through innovations in nanofabrication methods of advanced lithography of electron beams and nanoimprinting.
研究の目標 Outcome
高分子や金属,無機物質の界面機能を分子レベルで精密に設計・制御し,有機・無機・ハイブリッド材料のナノ/マイクロ加工手法を提案しています。金属や誘電体のナノ構造体や構造体間の制御されたナノ空間で,未踏の化学反応や物理現象を誘起することを目的とし,一桁ナノサイズの精密さで人工的に作られた場所を「メタサイト」と提唱し,その研究を先導しています。
We propose nano/micro fabrication methods for organic, inorganic, and hybrid materials by precisely designing and controlling the interfacial functions of polymers, metals, and inorganic materials at the molecular level. We have proposed and are leading research on "metasites," which are artificially created sites with single-digit nanoscale precision for the purpose of inducing unexplored chemical reactions and physical phenomena in nanostructures of metals and dielectrics and in the controlled nanospaces between the structures.
研究図Research Figure
Fig.2. (top-left) laser drilled polyimide through-hole mask, (top-right) silicon wafer with screen-printed UV-curable droplets, (middle-left) a region of (middle-right) printed UV-curable droplets, (bottom-left) imprint resist on silicon, (bottom-right) dry-etched silicon through imprint resist masks
文献 / Publications
(Review) Jpn. J. Appl. Phys. 2022, 61, SD0805; Microelectron. Eng. 2015, 133, 134; J. Photopolym. Sci. Technol. 2012, 25, 189. (Article) J. Vac. Sci. Technol. B 2022, 40, 062602; Sci. Rep. 2021, 11, 16550; Bull. Chem. Soc. Jpn. 2020, 93, 862; Chem. Lett. 2019, 48, 943; Langmuir 2018, 34, 9366.
研究者HP
- masaru.nakagawa.c5tohoku.ac.jp
- http://www2.tagen.tohoku.ac.jp/lab/nakagawa/